Kazunori Shinoda

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Speaker, Author, Co-Author

Tue. Sep 13, 2016 9:00 AM - 11:45 AM B9 (Exhibition Hall)

Oral presentation
| 8 Plasma Electronics
| 8.4 Plasma etching

[13a-B9-1~11] 8.4 Plasma etching

11:30 AM - 11:45 AM

[13a-B9-11] Atomic Layer Etching of TiN Using Formation and Desorption of Modified Layer

〇Kazunori Shinoda¹, Nobuya Miyoshi¹, Hiroyuki Kobayashi¹, Masaru Kurihara¹, Satoshi Sakai², Masaru Izawa², Kenji Ishikawa³, Masaru Hori³ (1.Hitachi, 2.Hitachi High-Tech, 3.Nagoya Univ.)

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