Toshinari Ueyama

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Speaker, Author, Co-Author

Tue. Sep 13, 2016 9:00 AM - 11:45 AM B9 (Exhibition Hall)

Oral presentation
| 8 Plasma Electronics
| 8.4 Plasma etching

[13a-B9-1~11] 8.4 Plasma etching

9:15 AM - 9:30 AM

△ [13a-B9-2] Phase-resolved interelectrode distribution of electron density in afterglow of synchronized dc imposed pulsed plasmas for advance dielectric etching processes

〇Toshinari Ueyama¹, Manabu Iwata², Yusuke Fukunaga¹, Takayoshi Tsutsumi¹, Keigo Takeda¹, Hiroki Kondo¹, Kenji Ishikawa¹, Makoto Sekine¹, Yoshinobu Ohya², Masaru Hori¹, Hideo Sugai³ (1.Nagoya Univ., 2.Tokyo Electron MIyagi Ltd., 3.Chubu Univ.)

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