atsushi shinozuka

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Speaker, Author, Co-Author

Tue. Sep 13, 2016 9:00 AM - 12:15 PM D61 (Bandaijima Bldg.)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[13a-D61-1~12] 7.3 Micro/Nano patterning and fabrication

10:15 AM - 10:30 AM

[13a-D61-6] Fabrication of Silicon Nano-wall

〇atsushi shinozuka¹, Xuejun Xu¹, Kentarou Sawano¹, Shuhei Yoshiba², Masakazu Hirai², Yukimi Ichikawa^1,2, Makoto Konagai^1,2 (1.Tokyocity Univ., 2.JST)

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