Koji Araki

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Speaker, Author, Co-Author

Tue. Sep 13, 2016 1:45 PM - 6:00 PM B8 (Exhibition Hall)

Symposium (Oral)
| Symposium
| Recent topics of point defects in semicondoctor crystals

[13p-B8-1~10] Recent topics of point defects in semicondoctor crystals

2:45 PM - 3:15 PM

[13p-B8-3] Control of point defects in Si wafer by ultrahigh-temperature RTP technique

〇Koji Araki¹, Haruo Sudo¹, Tatsuhiko Aoki¹, Susumu Maeda¹ (1.GlobalWafers Japan)