Khanh Phu Luong

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Speaker, Author, Co-Author

Tue. Sep 13, 2016 1:45 PM - 6:00 PM C301 (Nikko Tsuru)

Oral presentation
| 4 JSAP-OSA Joint Symposia 2016
| 4.8 Strong Light Excitation Phenomena Applied to Materials and Bio Engneering

[13p-C301-1~12] 4.8 Strong Light Excitation Phenomena Applied to Materials and Bio Engneering

5:00 PM - 5:15 PM

▲ [13p-C301-9] Wet etching on Rear Surface of a Silicon Substrate assisted by an Infrared Femtosecond Laser

〇(D)Khanh Phu Luong¹, Rie Tanabe¹, Yoshiro Ito¹ (1.Department of Mechanical Engineering, Nagaoka University of Technology)