Akinori Kaneko

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Speaker, Author, Co-Author

Tue. Sep 13, 2016 1:45 PM - 5:00 PM C31 (Nikko Kujaku AB)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.1 X-ray technologies

[13p-C31-1~11] 7.1 X-ray technologies

3:00 PM - 3:15 PM

[13p-C31-6] Thickness Distribution Control in Magnetron Sputtering Apparatus

〇(M1)Akinori Kaneko¹, Mitsunori Toyoda¹, Masaki Takata¹ (1.IMRAM, Tohoku Univ.)