Toshio Seki

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Speaker, Author, Co-Author

Tue. Sep 13, 2016 1:30 PM - 3:30 PM P4 (Exhibition Hall)

Poster presentation
| 7 Beam Technology and Nanofabrication
| 7.5 Ion beams

[13p-P4-1~4] 7.5 Ion beams

1:30 PM - 3:30 PM

[13p-P4-4] Fabrication of oblique pillar structure with ClF₃ neutral cluster beam

〇Toshio Seki¹, Tadashi Syojo², Kunihiko Koike², Hiroki Yamamoto³, Takahiro Kozawa³, Takaaki Aoki¹, Jiro Matsuo¹ (1.Kyoto Univ., 2.Iwatani Corp., 3.ISIR Osaka Univ.)