Takanori Mimura

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Speaker, Author, Co-Author

Wed. Sep 14, 2016 9:00 AM - 11:45 AM A23 (201B)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[14a-A23-1~10] 6.1 Ferroelectric thin films

10:30 AM - 10:45 AM

△ [14a-A23-6] Change of crystal structure and properties with heat treatment in ferroelectric HfO₂-based films

〇Takanori Mimura¹, Takao Shimizu², Hiroshi Uchida³, Takanori Kiguchi⁴, Akihiro Akama⁴, Toyohiko Konno⁴, Osami Sakata⁵, Hiroshi Funakubo^1,2,6 (1.Tokyo Tech. IGS, 2.Tokyo Tech. MECS, 3.Sophia Univ. FST, 4.Tohoku Univ. IMR, 5.NIMS, 6.Tokyo Tech. DMSE)