hiroki uchida

→ Search for hiroki uchida in Google Scholar

Speaker, Author, Co-Author

Wed. Sep 14, 2016 1:15 PM - 5:45 PM A37 (306-307)

Oral presentation
| 6 Thin Films and Surfaces
| 6.4 Thin films and New materials

[14p-A37-1~17] 6.4 Thin films and New materials

4:15 PM - 4:30 PM

△ [14p-A37-12] Low-temperature solid-phase epitaxial crystallization of impurity-doped β-Ga₂O₃ thin films by excimer laser annealing

〇hiroki uchida¹, kisho nakamura¹, nobuo tsuchimine², koji koyama³, satoru kaneko^4,1, akifumi matsuda¹, mamoru yoshimoto¹ (1.Tokyo Inst. of Tech., 2.TOSHIMA Manu., 3.NamikiPrecisionJewel, 4.KanagawaInd.Tech.Cen.)