Koki Segawa

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Speaker, Author, Co-Author

Wed. Sep 14, 2016 1:45 PM - 4:15 PM B1 (Exhibition Hall)

Symposium (Oral)
| Symposium
| IoT/IoE Device Technologies for AI/Deep-Learning era

[14p-B1-1~6] IoT/IoE Device Technologies for AI/Deep-Learning era

3:45 PM - 4:00 PM

[14p-B1-5] Template removal of low–k films in supercritical CO₂ fluid

〇(M1C)Koki Segawa¹, Eiichi Kondoh¹, Mitsuhiro Watanabe¹, Mikhail R. Baklanov², Liping Zhang² (1.Yamanashi Univ., 2.IMEC)