Kazuya Dobashi

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Speaker, Author, Co-Author

Wed. Sep 14, 2016 1:30 PM - 3:30 PM P4 (Exhibition Hall)

Poster presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[14p-P4-1~5] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

1:30 PM - 3:30 PM

[14p-P4-1] Adhesion behavior of metal contamination in the isopropyl alcohol

〇Kazuya Dobashi¹, Misako Saito¹ (1.Tokyo Electron Ltd.)