Toshifumi Konishi

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Speaker, Author, Co-Author

Wed. Sep 14, 2016 1:30 PM - 3:30 PM P5 (Exhibition Hall)

Poster presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[14p-P5-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

1:30 PM - 3:30 PM

[14p-P5-1] A Mechanical Noise Analysis Method for CMOS-MEMS Inertial Sensor

〇Toshifumi Konishi¹, Daisuke Yamane^2,4, Hiroyuki Ito^2,4, Shiro Dosho^2,4, Noboru Ishihara^2,4, Hiroshi Toshiyoshi^3,4, Kazuya Masu^2,4, Katsuyuki Machida^1,4 (1.NTT-AT, 2.Tokyo Tech., 3.Univ. of Tokyo, 4.JST-CREST)

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