Shuichi Murakami

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Speaker, Author, Co-Author

Wed. Sep 14, 2016 1:30 PM - 3:30 PM P5 (Exhibition Hall)

Poster presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[14p-P5-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

1:30 PM - 3:30 PM

[14p-P5-4] Fabrication of MEMS Sensors for Detecting Specific Sonic Wave in Applying to Experimental Rodent Models

〇Shuichi Murakami¹, Ryo Iwaki², Kazuo Satoh¹, Tsunehisa Tanaka¹, Mayumi Uno¹, Takashi Tateno² (1.TRI-Osaka, 2.Graduate School of Sci. and Tech., Hokkaido Univ.)

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