Minoru Sasaki

→ Search for Minoru Sasaki in Google Scholar

Speaker, Author, Co-Author

Wed. Sep 14, 2016 1:30 PM - 3:30 PM P5 (Exhibition Hall)

Poster presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[14p-P5-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

1:30 PM - 3:30 PM

[14p-P5-8] Nano-Gap Electrode Array Prepared by Photolithography and UV Curing Processing

Mako Kumeuchi¹, Shinya Kumagai¹, Hyungjun Cho², Hiroki Kondo², Kenji Ishikawa², Masaru Hori², 〇Minoru Sasaki¹ (1.Toyota Tech. Inst., 2.Nagoya Univ.)