Kiyokazu Nakagawa

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Speaker, Author, Co-Author

Wed. Sep 14, 2016 1:30 PM - 3:30 PM P9 (Exhibition Hall)

Poster presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[14p-P9-1~18] 15.6 Group IV Compound Semiconductors (SiC)

1:30 PM - 3:30 PM

[14p-P9-6] Ohmic contact formation for n⁺4H-SiC substrate by selective heating method using hydrogen radical irradiation

Tetsuji Arai¹, Kazuki Kamikura¹, Chiaya Yamamoto¹, Mai Shirakura¹, Keisuke Arimoto¹, Junji Yamanaka¹, 〇Kiyokazu Nakagawa¹, Toshiyuki Takamatsu², Masaaki Ogino³, Masaaki Tachioka³, Haruo Nakazawa³ (1.Univ. Yamanashi, 2.SST Inc., 3.Fuji Electric Co., Ltd.)