Yukiaki Oono

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 9:00 AM - 12:00 PM A22 (Main Hall B)

Oral presentation
| Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[15a-A22-1~11] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

10:30 AM - 10:45 AM

[15a-A22-6] Development of Low Resistivity ITO Film Deposited at Low Temperature Sputtering

〇Yukiaki Oono¹, Masanori Shirai¹, Motoshi Kobayashi¹, Hirohisa Takahashi¹, Satoru Ishibashi¹ (1.ULVAC, Inc.)