Tatsuhiko Aoki

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 9:00 AM - 11:45 AM A23 (201B)

Oral presentation
| 15 Crystal Engineering
| 15.8 Crystal evaluation, impurities and crystal defects

[15a-A23-1~10] 15.8 Crystal evaluation, impurities and crystal defects

10:30 AM - 10:45 AM

[15a-A23-6] Thermal simulation of Si wafer in ultrahigh-temperature RTP

〇Tatsuhiko Aoki¹, Haruo Sudo¹, Koji Araki¹, Koji Izunome¹ (1.GlobalWafers Japan)