Hideyuki Okamura

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 9:00 AM - 11:45 AM A23 (201B)

Oral presentation
| 15 Crystal Engineering
| 15.8 Crystal evaluation, impurities and crystal defects

[15a-A23-1~10] 15.8 Crystal evaluation, impurities and crystal defects

11:00 AM - 11:15 AM

[15a-A23-8] Annihilation behavior of oxygen precipitate nuclei in nitrogen doped Cz-silicon wafers by ultrahigh-temperature RTP

〇Hideyuki Okamura¹, Haruo Sudo¹, Koji Araki¹, Hiroyuki Saito¹, Susumu Maeda¹, Koji Sueoka², Kozo Nakamura³ (1.GlobalWafers Japan, 2.Faculty of Computer Science and System Engineering, Okayama Pref. Univ., 3.Regional Cooperative Research Organization, Okayama Pref. Univ.)

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