Susumu Maeda

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 9:00 AM - 11:45 AM A23 (201B)

Oral presentation
| 15 Crystal Engineering
| 15.8 Crystal evaluation, impurities and crystal defects

[15a-A23-1~10] 15.8 Crystal evaluation, impurities and crystal defects

11:15 AM - 11:30 AM

[15a-A23-9] Precipitation behavior of oxygen in nitrogen doped Cz-silicon wafers by ultra-high temperature RTP

〇Susumu Maeda¹, Haruo Sudo¹, Koji Araki¹, Hiroyuki Saito¹ (1.GlobalWafers Japan)