Shunpei Ota

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 9:00 AM - 12:00 PM A26 (203-204)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[15a-A26-1~11] 6.2 Carbon-based thin films

10:30 AM - 10:45 AM

[15a-A26-6] Characteristics of Carbon nitride film fabricated by reactive sputtering method

〇Shunpei Ota¹, Kazushi Fuse¹, Yusuke Miyaguchi¹, Hyung-Woo Ahn¹, Takehito Jimbo¹ (1.ISET, ULVAC, Inc.)