Shogo Tamaki

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 9:00 AM - 12:15 PM B10 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[15a-B10-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

9:00 AM - 9:15 AM

[15a-B10-1] Study on the Si deposition process in Atmospheric-Pressure Plasma for application to low-temperature thin film transistors

〇Shogo Tamaki¹, Koji Terawaki¹, Yuichiro Kimoto¹, Kohei Kamada¹, Hiromasa Ohmi¹, Hiroaki Kakiuchi¹, Kiyoshi Yasutake¹ (1.Graduate School of Engineering, Osaka University)

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