ryo yokogawa

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 9:00 AM - 12:15 PM B10 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[15a-B10-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

11:15 AM - 11:30 AM

△ [15a-B10-10] Evaluation of Nanostructure in Poly-Si Grain by Raman Spectroscopy

〇ryo yokogawa¹, Takahiro Suzuki¹, Ryota Suzuki¹, Kazuya Takahashi², Katsuhiko Komori², Tamotsu Morimoto³, Naomi Sawamoto¹, Atsushi Ogura¹ (1.Meiji Univ., 2.Development Dept., Tokyo Electron Tohoku Ltd., 3.Tokyo Electron Ltd.)

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