Daisuke Hishitani

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 9:00 AM - 12:15 PM B10 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[15a-B10-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

10:30 AM - 10:45 AM

△ [15a-B10-7] Fabrication and evaluation of liquid silicon vapor deposition-derived crystal silicon thin-film transistor

〇Daisuke Hishitani¹, Yasuaki Ishikawa¹, Hiroshi Ikenoue², Miki Trifunovic³, Ryoichi Ishihara³, Tatsuya Shimoda⁴, Yukiharu Uraoka¹ (1.NAIST, 2.Kyushu univ., 3.TU Delft, 4.JAIST)

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