shogo okuyama

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 10:00 AM - 12:15 PM B2 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[15a-B2-1~8] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

10:15 AM - 10:30 AM

[15a-B2-2] Water Nozzle Design for Batch-type Silicon Wafer Wet Cleaning Bath

〇shogo okuyama¹, Kento Miyazaki¹, Nobutaka Ono¹, Hitoshi Habuka¹, Akihiro Goto² (1.Yokohama Nat. Univ., 2.Pre-Tech)