Satoshi Okubo

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 10:15 AM - 11:45 AM B9 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[15a-B9-1~6] 13.3 Insulator technology

10:30 AM - 10:45 AM

△ [15a-B9-2] Electric characteristics of ALD Al₂O₃ films formed using different oxidants

〇Satoshi Okubo¹, Daisuke Matsumura¹, Atsushi Hiraiwa¹, Hiroshi Kawarada¹ (1.Waseda University)