Nobuyuki Fujimura

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 10:15 AM - 11:45 AM B9 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[15a-B9-1~6] 13.3 Insulator technology

11:00 AM - 11:15 AM

[15a-B9-4] Inner Potential Distribution and Interface Dipoles in HfO₂/SiO₂/Si(100) Structure as Evaluated by XPS

〇Nobuyuki Fujimura¹, Akio Ohta¹, Mitsuhisa Ikeda¹, Katsunori Makihara¹, Seiichi Miyazaki¹ (1.Nagoya Univ.)