Yoko Nishino

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 9:00 AM - 12:15 PM C302 (Nikko Houou)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[15a-C302-1~12] 15.6 Group IV Compound Semiconductors (SiC)

11:30 AM - 11:45 AM

[15a-C302-10] Wafer quality evaluation of high-speed SiC laser slicing wafer

〇Yoko Nishino¹, Kazuya Hirata¹, Kunimitsu Takahashi¹ (1.DISCO corp.)