Keisuke Kurashima

→ Search for Keisuke Kurashima in Google Scholar

Speaker, Author, Co-Author

Thu. Sep 15, 2016 9:00 AM - 12:15 PM C302 (Nikko Houou)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[15a-C302-1~12] 15.6 Group IV Compound Semiconductors (SiC)

12:00 PM - 12:15 PM

[15a-C302-12] SiC wafer etching rate behavior using ClF₃ gas

Ken Nakagomi¹, 〇Keisuke Kurashima¹, Shogo Okuyama¹, Hitoshi Habuka¹, Yoshinao Takahashi², Tomohisa Kato³ (1.Yokohama Nat Univ., 2.Kanto Denka Kogyo, 3.AIST)