MINH HONG MAI

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 9:00 AM - 12:15 PM C302 (Nikko Houou)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[15a-C302-1~12] 15.6 Group IV Compound Semiconductors (SiC)

10:45 AM - 11:00 AM

[15a-C302-7] Deposition Rate and Anti-Corrosion of Amorphous SiC Film Formed at Room Temperature under Soft Plasma

〇MINH HONG MAI¹, Maria Tanaka¹, Kohei Shioda¹, Hitoshi Habuka¹ (1.Yokohama Nat. Univ.)