Naohisa Inoue

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 1:15 PM - 6:45 PM A23 (201B)

Oral presentation
| 15 Crystal Engineering
| 15.8 Crystal evaluation, impurities and crystal defects

[15p-A23-1~20] 15.8 Crystal evaluation, impurities and crystal defects

3:45 PM - 4:00 PM

[15p-A23-10] Measurement of oxygen concentration in FZ silicon crystal

〇Naohisa Inoue^6,1, Masumi Obuchi², Hiroyuki Uno³, Keiko Inoue⁴, Kaori Watanabe⁵, Yuichi Kawamura⁶ (1.Tokyo Univ. Agri. & Technol., 2.Nano Science Corp., 3.SHI Exam. & Insp., 4.Toray Research C. Inc., 5.Systems Eng. Inc., 6.Osaka Pref. Univ.)

4:00 PM - 4:15 PM

[15p-A23-11] Measurement of carbon concentration in silicon crystal (Ⅸ) from1E+16 to 1E+13

〇Naohisa Inoue^1,6, Keiko Inoue², Hisayoshi Ito³, Masumi Obuchi⁴, Kaori Watanabe⁵, Yuichi Kawamura⁶ (1.Tokyo Univ. Agri. & Technol., 2.Toray Research C. Inc., 3.JAEA, 4.Nano Science Corp., 5.Systems Eng. Inc., 6.Osaka Pref. Univ.)

4:15 PM - 4:30 PM

[15p-A23-12] Sensitivity and detection limit of carbon concentration measurement in silicon crystal

〇Naohisa Inoue^2,1 (1.Tokyo Univ. Agri. & Technol., 2.Osaka Pref. Univ.)

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