Yuji Okamoto

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 1:45 PM - 6:30 PM B10 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[15p-B10-1~17] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

4:45 PM - 5:00 PM

[15p-B10-11] Decomposition of SiCl₄ at atmospheric pressure using hydrogen radical
generated by thermal filament method

〇Yuji Okamoto^1,2, Daiki Tsutsumi³, Takamasa Ishigaki³, Fatima Zohra Dahmani⁴, Masatomo Sumiya² (1.Tsukuba Univ., 2.NIMS, 3.Hosei Univ., 4.USTO-MB.)