Toru Watanabe

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 1:45 PM - 6:30 PM B10 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[15p-B10-1~17] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

5:00 PM - 5:15 PM

[15p-B10-12] Rate Theory of Silicon Epitaxial Growth in SiHCl₃-SiH_x-H₂ system

〇Toru Watanabe¹, Hitoshi Habuka¹, Ayumi Saito¹ (1.Yokohama Nat. Univ.)