Takuya Toma

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 1:45 PM - 6:30 PM B10 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[15p-B10-1~17] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

5:30 PM - 5:45 PM

△ [15p-B10-14] Formation of porous SiO₂ films by F₂-laser deposition

〇Takuya Toma¹, Akira Suwa¹, Daisuke Nakamura¹, Hiroshi Ikenoue¹ (1.Kyushu Univ.)