Yohei Sugawara

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 1:45 PM - 6:30 PM B10 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[15p-B10-1~17] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

5:45 PM - 6:00 PM

[15p-B10-15] Evaluation of Depth-dependent Interface States at TSV-liner SiO₂ Using Multi-well Structured TSV

〇Yohei Sugawara¹, Hisashi Kino², Takafumi Fukushima¹, Kang-Wook Lee³, Mitumasa Koyanagi³, Tetsu Tanaka^1,4 (1.Graduate School of Engineering of Tohoku Univ., 2.FRIS, Tohoku Univ., 3.NICHe, Tohoku Univ., 4.Graduate School of Biomedical Engineering of Tohoku Univ.)