Toshiaki Takahashi

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 1:45 PM - 6:30 PM B10 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[15p-B10-1~17] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

3:30 PM - 3:45 PM

[15p-B10-7] Design and fabrication of MEMS Fabry-Perot interferometric surface-stress sensor with high wavelength selectivity

〇(M1)Toshiaki Takahashi¹, Yoshihiro Masuya¹, Hayato Ishida¹, Takeshi Hizawa¹, Kazuhiro Takahashi¹ (1.Toyohashi Tech.)