TERUAKI SAFU

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 1:45 PM - 6:30 PM B10 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[15p-B10-1~17] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

3:45 PM - 4:00 PM

[15p-B10-8] A Design of Spring Constant for MEMS Accelerometer by Multi-layer Metal Technology (I)

〇TERUAKI SAFU¹, Toshifumi Konishi¹, Daisuke Yamane^2,4, Hiroshi Toshiyoshi^3,4, Masato Sone^2,4, Kazuya Masu^2,4, Katsuyuki Machida^1,4 (1.NTT-AT, 2.Tokyo Institute of Technology, 3.The Univ. of Tokyo, 4.JST-CREST)

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