Kenta Nakazawa

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 1:45 PM - 6:30 PM B10 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[15p-B10-1~17] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

4:00 PM - 4:15 PM

[15p-B10-9] Fabrication of varifocal scanner with piezoresistive angle and focal length sensors

〇(D)Kenta Nakazawa¹, Takashi Sasaki¹, Hiromasa Furuta², Jiro Kamiya², Hideki Sasaki², Toshikazu Kamiya², Kazuhiro Hane¹ (1.Tohoku Univ., 2.Panasonic Industrial Devices SUNX)

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