Kazuto Ohsawa

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 1:15 PM - 5:45 PM B9 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[15p-B9-1~17] 13.3 Insulator technology

3:30 PM - 3:45 PM

△ [15p-B9-10] Deposition Temperature and Al₂O₃ Thickness Dependence on the Mobility of HfO₂/Al₂O₃/InGaAs Gate Stacks

〇Kazuto Ohsawa¹, Nobukazu Kise¹, Yasuyuki miyamoto¹ (1.Tokyo Tech)