Woojin Song

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 1:15 PM - 5:45 PM B9 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[15p-B9-1~17] 13.3 Insulator technology

4:00 PM - 4:15 PM

▲ [15p-B9-11] GeO₂ reduction and Si oxidation at SiGe/GeO₂ interface in UHV annealing

〇(D)Woojin Song¹, Akira Toriumi¹ (1.The Univ. Tokyo)