Shigehisa Shibayama

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 1:15 PM - 5:45 PM B9 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[15p-B9-1~17] 13.3 Insulator technology

1:30 PM - 1:45 PM

△ [15p-B9-2] Polarization inhomogeneity due to local internal field in ferroelectric HfO₂ film

〇Shigehisa Shibayama^1,2, Lun Xu¹, Xuan Tian¹, Shinji Migita³, Akira Toriumi¹ (1.The Univ. of Tokyo, 2.JSPS, 3.AIST)