Yoshiki Iizawa

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 1:30 PM - 3:30 PM P2 (Exhibition Hall)

Poster presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[15p-P2-1~15] 6.2 Carbon-based thin films

1:30 PM - 3:30 PM

[15p-P2-2] Fabrication and structural analysis of a-CN_x:H films with high nitrogen contents by RF plasma CVD

〇Yoshiki Iizawa¹, Kenya Hiramatsu¹, Hidetoshi Saitoh¹, Haruhiko Ito¹ (1.Nagaoka Univ. of Tech.)