Shoma Hazaka

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 1:30 PM - 3:30 PM P2 (Exhibition Hall)

Poster presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[15p-P2-1~15] 6.2 Carbon-based thin films

1:30 PM - 3:30 PM

[15p-P2-3] Source Si/C ratio dependence of HMDS-introduced CVD camphoric carbon thin films

〇Shoma Hazaka¹, Kenta Nishimura¹, Hiroyasu Ishikawa^1,2 (1.Shibaura Inst. Tech., 2.SIT RC Green Innov.)