Yoshinobu Matsuda

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Speaker, Author, Co-Author

Tue. Sep 13, 2016 9:00 AM - 11:45 AM B7 (Exhibition Hall)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma measurements and diagnostics

[13a-B7-1~11] 8.2 Plasma measurements and diagnostics

9:45 AM - 10:00 AM

[13a-B7-4] Temporal change in gas and wall temperatures during inductively-coupled plasma assisted DC magnetron discharge

〇Yoshinobu Matsuda¹, Hisayoshi Shinagawa¹, Yasuhiro Chikushi¹, Masanori Shinohara¹ (1.Nagasaki Univ.)

Thu. Sep 15, 2016 1:30 PM - 3:30 PM P6 (Exhibition Hall)

Poster presentation
| 8 Plasma Electronics
| 8.3 deposition of thin film and surface treatment

[15p-P6-1~16] 8.3 deposition of thin film and surface treatment

1:30 PM - 3:30 PM

[15p-P6-1] Sputter-deposition of NdFeB/Ta magnetic thin films using Sputtering

Kota Kodama¹, Tomohiro Himaki¹, Masanori Shinohara¹, 〇Yoshinobu Matsuda¹ (1.Nagasaki Univ.)