Toru Harigai

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 1:30 PM - 3:30 PM P6 (Exhibition Hall)

Poster presentation
| 8 Plasma Electronics
| 8.3 deposition of thin film and surface treatment

[15p-P6-1~16] 8.3 deposition of thin film and surface treatment

1:30 PM - 3:30 PM

△ [15p-P6-3] Formation of Cu Film by Applying RF Substrate Bias to Ion Beam Sputtering Using ECR-MW Plasma Source

〇Toru Harigai¹, Masafumi Yamano¹, Takahiro Imai¹, Yushi Iijima¹, Ryo Isono¹, Yoshiyuki Suda¹, Hirofumi Takikawa¹ (1.Toyohashi Univ. Technol.)