Takashi Kimura

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 1:30 PM - 3:30 PM P6 (Exhibition Hall)

Poster presentation
| 8 Plasma Electronics
| 8.3 deposition of thin film and surface treatment

[15p-P6-1~16] 8.3 deposition of thin film and surface treatment

1:30 PM - 3:30 PM

[15p-P6-6] Preparation of Si-DLC films by reactive HPPMS combined with bipolar pulse bias system

Hikaru Kamata¹, 〇Takashi Kimura¹, Setsuo Nakao², Kingo Azuma³ (1.NITech, 2.AIST, 3.Univ. Hyogo)