Yuji Kasashima

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 1:30 PM - 3:30 PM P7 (Exhibition Hall)

Poster presentation
| 8 Plasma Electronics
| 8.4 Plasma etching

[15p-P7-1~2] 8.4 Plasma etching

1:30 PM - 3:30 PM

[15p-P7-2] Monitoring of films deposited on inner walls of plasma etching chamber

〇Yuji Kasashima¹, Fumihiko Uesugi¹ (1.AIST)