Masashi Seki

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Speaker, Author, Co-Author

Fri. Sep 16, 2016 9:00 AM - 10:30 AM B3 (Exhibition Hall)

Oral presentation
| 6 Thin Films and Surfaces
| 6.5 Surface Physics, Vacuum

[16a-B3-1~6] 6.5 Surface Physics, Vacuum

9:30 AM - 9:45 AM

[16a-B3-3] Surface analysis of Si substrate with Ar ion bombardment by Raman Spectroscopy and RBS

〇Masashi Seki¹, Chiaki Tanuma² (1.Toshiba TEC Corp., 2.Hosei Univ.)