Yusuke Sugino

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Speaker, Author, Co-Author

Fri. Sep 16, 2016 9:30 AM - 11:30 AM P4 (Exhibition Hall)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[16a-P4-1~8] 13.3 Insulator technology

9:30 AM - 11:30 AM

[16a-P4-6] Consideration of Fabrication Method in Si-MOS Interface Layer by Chemical Oxidation

〇Yusuke Sugino¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.Tokyo Univ. of Agri & Tech)