Daichi Yamada

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Speaker, Author, Co-Author

Fri. Sep 16, 2016 9:30 AM - 11:30 AM P4 (Exhibition Hall)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[16a-P4-1~8] 13.3 Insulator technology

9:30 AM - 11:30 AM

[16a-P4-7] Effects of gate-electrode metals on the electrical properties of Al₂O₃/GeO₂/p-Ge MOS capacitor grown by REALD

〇Daichi Yamada¹, Yohei Otani¹, Chiaya Yamamoto², Junji Yamanaka², Tetsuya Sato², Hiroshi Okamoto³, Yukio Fukuda¹ (1.Tokyo Univ. of Science, Suwa, 2.Univ. of Yamanashi, 3.Hirosaki Univ.)