TAKAYUKI SUZUKI

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Speaker, Author, Co-Author

Fri. Sep 16, 2016 1:30 PM - 5:00 PM B1 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.8 Compound and power electron devices and process technology

[16p-B1-1~13] 13.8 Compound and power electron devices and process technology

1:30 PM - 1:45 PM

[16p-B1-1] Surface Stabilization of AlGaN/GaN HEMTs by Plasma Enhanced Atomic Layer Deposition

〇TAKAYUKI SUZUKI¹, TOMIAKI YAMADA¹, RYOUSUKE KAWAI¹, SHOHEI KAWAGUCHI¹, DONGYAN ZHANG¹, NAOTAKA IWATA¹ (1.Toyota Tech. Inst.)